• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
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    • 专利摘要:
    Non-volatile memory (MEM1) comprising rows and columns of memory cells (C1, j), the memory cell columns comprising pairs of twin memory cells (C1, j, C2, j1) including a selection grid (CSG1, 2) common. According to the invention, two bit lines (B1, j, B2, j + 1) are provided per column of memory cells. The adjacent adjacent memory cells of the same column are not connected to the same bit line while the adjacent non-twin memory cells of the same column are connected to the same bit line.
    公开号:FR3036221A1
    申请号:FR1554163
    申请日:2015-05-11
    公开日:2016-11-18
    发明作者:Rosa Francesco La；Stephan Niel；Arnaud Regnier
    申请人:STMicroelectronics Rousset SAS；
    IPC主号:
    专利说明:

    [0001] INTERCONNECTION STRUCTURE OF TWO MEMORY CELLS FIG. 1 represents a memory map structure MAO comprising memory cells of the type described in application US 2013/0228846. The memory cells M ,,, + 1 of rank "i" belong to a physical page PG, of the memory plane and are connected to a word line WL, _1 ,, and to a gate control line CGL ,. The memory cells 1 4,4 M, _1,1 + 1 of rank "i-1" belong to a physical page PG, 4 of rank "i-1" of the memory plane and are connected to the word line WL, _1 ,, and to a gate control line CG41. The memory cells 1 4,4 J of rank "j" are accessible in reading and writing via a bit line Bi and the memory cells Mi, i + i, 1, i + 1 of rank 1 1 "are accessible in reading and writing via a bit line Bi 1. Each memory cell comprises a floating gate transistor (FG), respectively Tij, Ti_1j + 1. The drain regions (D) of the transistors j are connected to the bit line Bi and the drain terminals of the transistors T, J + 1, T, _1, i + 1 are connected to the bit line B1 + 1. The control gates CG of the transistors T1j, are connected to the gate control line CGL, and the control gates CG of the floating gate transistors Ti-u, are connected to the gate control line CGL1-i.
    [0002] Each floating gate transistor has its source terminal (S) connected to a source line SL via a selection transistor ST. The selection transistors ST of the memory cells Mu and M, _10 have a CSG common selection gate and the two memory cells are, therefore, called "binoculars". Similarly, memory cells and 1 ^ 41-1J + 1 are twin memory cells and their selection transistors ST have a common selection gate CSG. Each selection grid CGS is a vertical grid buried in a substrate in which the memory plane MAO is implanted, the source line SL being also buried. These CSG common selection grids of twin memory cells, are connected to the word line WLi-i, i.
    [0003] Such memory cells may be erased or programmed by the channel, that is to say by carrying the substrate at a positive erase or negative programming voltage causing the extraction of electric charges from their floating gates or the injection electric charges in their floating gates, by Fowler-Nordheim effect. More particularly, the erasure of a memory cell is ensured by combining the positive voltage applied to the substrate with a negative voltage applied to the control gate of its floating gate transistor, while the control gate of the gate transistor The floating cell of the twin memory cell receives a positive erase inhibit voltage to prevent it being simultaneously erased. Similarly, the programming of a memory cell can be ensured by combining a negative voltage applied to the bit line concerned and to the substrate, to a positive voltage applied to the control gate of its floating gate transistor, while the control gate of the floating gate transistor of the twin memory cell receives a negative programming inhibition voltage to prevent it being simultaneously programmed. Memory cell programming can also be provided by injecting hot electrons by flowing current through the bit lines. Finally, the reading of a memory cell is ensured by applying a positive voltage to the control gate CG of its floating gate transistor, as well as a positive voltage to the corresponding bit line, while the memory cell twin, which is connected to the same bit line, receives on its control gate a negative read inhibition voltage to prevent it from being simultaneously read (Fig 9 of the aforementioned request). This conventional memory array structure comprising twin memory cells therefore requires providing a word line decoder capable of applying a positive read voltage to a memory cell to be read while applying a read inhibit voltage. negative to its twin memory cell. It may be desired to provide an enhancement of this memory array structure and twin memory cells that allows reading of a memory cell without applying a negative read inhibit voltage to the twin memory cell. Embodiments of the invention provide a non-volatile memory on a semiconductor substrate, comprising rows and columns of memory cells, the memory cell columns comprising pairs of twin memory cells 30 each comprising a floating-frequency transistor and a selection transistor comprising a selection gate common to the selection transistor of the twin memory cell, bit lines each connected to conduction terminals of floating-gate transistors of the same column of memory cells, control lines of cross-lines to the bit lines, connected to control gates of floating gate transistors of the same row, and two bit lines per column of memory cells, and in which two adjacent adjacent memory cells of the same column do not are not connected to the same 3036221 3 bit line while two adjacent non-twin memory cells of the same column are connected to the same bit line. According to one embodiment, the memory comprises, for two adjacent columns of memory cells, three bit lines arranged and superimposed over a first column of memory cells on three different interconnection levels and a fourth bit line. arranged above a second column of memory cells. According to one embodiment, the memory comprises a first bit line aligned on a first bit line axis extending over a first column of memory cells, and connected to floating gate transistors of the first column by a first conductive path comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers, a second bit line aligned with the first bit line axis, and connected to floating gate transistors of the first column by a second conductive path comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers, a third bit line aligned with the first bit line axis, and connected to floating gate transistors a second column of memory cells by a third conductive path comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers, and a fourth bit line aligned with a second bit line axis extending above the second column of memory cells, and connected to floating gate transistors. by a fourth conductive path comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers.
    [0004] According to one embodiment, the memory comprises first, second, third, fourth and fifth insulating layers, the first bit line extends over the second insulating layer, the second bit line extends over the third insulating layer. the third bit line extends over the fifth insulating layer, and the fourth bit line 30 extends over the fifth insulating layer. According to one embodiment, the first conductive path comprises a via aligned with the first bit line axis, passing through the first insulating layer, a conductive line section aligned on the first bit line axis, arranged on the first layer 35 insulator, and a via aligned with the first bit line axis, passing through the second insulating layer.
    [0005] According to one embodiment, the second conductive path comprises a via aligned with the first bit line axis, passing through the first insulating layer, a conductive line section extending from the first bit line axis to the second bit line axis, arranged on the first insulating layer, a via aligned with the second bit line axis, passing through the second insulating layer, a conductive line section aligned with the second bit line axis, arranged on the second insulating layer, a via aligned with the second bit line axis, traversing a third insulating layer, and a conductive line section extending from the second bit line axis to the first bit line axis, arranged on the third insulating layer. According to one embodiment, the third conductive path comprises a via aligned with the second bit line axis, passing through the first insulating layer, a conductive line section aligned on the first bit line axis, arranged on the first layer 15 an insulator, a via aligned on the first bit line axis, passing through the second insulating layer, a conductive line section aligned on the second bit line axis, arranged on the second insulating layer, a via aligned with the second axis of bit line, passing through the third insulating layer, a conductive line section aligned on the second bit line axis, arranged on the third insulating layer, a via aligned with the second bit line axis, passing through the fourth insulating layer; a conductive line section extending from the second bit line axis to the first bit line axis, arranged on the fourth insulating layer, and a via aligned with the first bit line axis, traversing a fifth insulating layer.
    [0006] According to one embodiment, the fourth conductive path comprises a via aligned with the second bit line axis, passing through the first insulating layer, a conductive line section aligned with the first bit line axis, arranged on the first layer insulating, a via aligned on the first bit line axis, passing through the second insulating layer, a conductive line section aligned on the second bit line axis, arranged on the second insulating layer, a via aligned with the second axis; bit line, traversing the third insulating layer, a conductive line section aligned on the second bit line axis, arranged on the third insulating layer, a via aligned with the second bit line axis, passing through the fourth insulating layer , a conductive line section arranged on the fourth insulating layer, and a via aligned with the second bit line axis 35, passing through a fifth insulating layer.
    [0007] According to one embodiment, the memory comprises read circuits and a column decoder configured to read the memory cells of the same column through one of the two bit lines allocated to the column.
    [0008] Embodiments of the invention also relate to a method for manufacturing a non-volatile memory on a semiconductor substrate, the memory comprising pairs of twin memory cells each comprising a floating gate transistor and a selection transistor comprising a selection grid common to the selection transistor of the twin memory cell, the method comprising the steps of providing first and second columns of memory cells each comprising pairs of twin memory cells, performing a first bit line aligned with a first bit line axis extending over the first column of memory cells, and connected to floating gate transistors of non-binocular memory cells of the first column by a first conductive path comprising vias traversing insulating layers and sections of conductive lines arranged on the layers i solantes, making a second bit line aligned on the first bit line axis, and connected to floating gate transistors of other non-twin memory cells of the first column by a second conductive path comprising vias traversing insulating layers and sections of conductive lines arranged on the insulating layers, making a third bit line aligned with the first bit line axis, and connected to floating gate transistors of non-twin memory cells of the second column by a third conductive path comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers, and providing a fourth bit line aligned with a second bit line axis extending above the second column of memory cells, and connected to floating gate transistors of other non-twin memory cells of the second column by a fourth conductive path comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers.
    [0009] According to one embodiment, the method comprises the steps of making first, second, third, fourth and fifth insulating layers, making the first bit line on the second insulating layer, making the second bit line on the third layer insulating, realize the third bit line on the fifth insulating layer, and realize the fourth bit line on the fifth insulating layer.
    [0010] According to one embodiment, steps of making the first conductive path comprise the realization of a via aligned on the first bit line axis, passing through a first insulating layer, of a conductive line section aligned on the first bit line axis, arranged on the first insulating layer, and a via aligned with the first bit line axis, passing through a second insulating layer. According to one embodiment, steps for producing the second conductive path comprise the production of a via aligned with the first bit line axis, passing through a first insulating layer, of a conductive line section extending from the first axis. from one bit line to the second bit line axis, arranged on the first insulating layer, of a via aligned with the second bit line axis, traversing a second insulating layer, of an aligned conductive line section. on the second bit line axis, arranged on the second insulating layer, a via aligned with the second bit line axis, traversing a third insulating layer, and a conductive line portion extending from the second bit line axis to the first bit line axis, arranged on the third insulating layer. According to one embodiment, steps of making the third conductive path comprise the realization of a via aligned with the second bit line axis, passing through a first insulating layer, of a conductive line section aligned on the first axis. bit line, arranged on the first insulating layer, of a via aligned with the first bit line axis, passing through a second insulating layer, of a conductive line section aligned on the second bit line axis, arranged on the second insulating layer, a via aligned with the second bit line axis, passing through a third insulating layer, a conductive line section aligned on the second bit line axis, arranged on the third insulating layer; a via aligned with the second bit line axis traversing a fourth insulating layer, a conductive line section extending from the second bit line axis to the first bit line axis, a arranged on the fourth insulating layer, and a via aligned with the first bit line axis, passing through a fifth insulating layer. According to one embodiment, steps for producing the fourth conductive path comprise the production of a via aligned with the second bit line axis, passing through a first insulating layer, of a conductive line section aligned on the first axis 35. a bit line, arranged on the first insulating layer, of a via aligned with the first bit line axis, passing through a second insulating layer, of a conductive line section 3036221 aligned with the second bit line axis, arranged on the second insulating layer, a via aligned with the second bit line axis, passing through a third insulating layer, with a conductive line section aligned on the second bit line axis, arranged on the third insulating layer , a via aligned on the second bit line axis, passing through a fourth insulating layer, a conductive line section arranged on the fourth insulating layer, and a via aligned with the second my bit line axis, crossing a fifth insulating layer. Embodiments of a memory array structure, memory cells, and a method of manufacturing such a memory array structure and memory cells will be described in the following with reference to, but not limited to, the figures attached, among which: FIG. 1 previously described is the electrical diagram of a conventional memory plane structure and twin memory cells; FIG. 2 is the electrical diagram of an embodiment of a memory plane comprising twin memory cells according to the invention, - Figures 3 to 7 are top views of a semiconductor substrate showing steps of a method of manufacturing the twin memory cells, - Figures 8A, 9, 10A, 11 , 12A, 13, 14A, 15, 16A, 17A are top views of the semiconductor substrate showing further steps in the method of manufacturing the twin memory cells, FIGS. 8B, 10B, 12B, 14B, 16B, 17B are views in pe rspective corresponding to the top views of FIGS. 8A, 10A, 12A, 14A, 16A, 17A, and - FIG. 18 is the circuit diagram of a memory comprising the memory plane of FIG. 2, FIG. 2 is the electrical diagram. of an embodiment of a memory array MA1 according to the invention, implanted in a semiconductor substrate. The memory plane comprises rows and columns of memory cells, eight memory cells C 1, j, C 2, C 3, C, C 4, j, Cl, j + 1, C 2, j + 1, C 3, j + 1, C4, j + 1 being shown here. Each memory cell comprises a floating gate transistor (FG), respectively T1, j, T2, j, T3, j, T4, j, T1, j + 1, T2, j + 1, T3, j + 1, T4, j + 1, and a selection transistor ST whose drain terminal (D) is connected to the source terminal (S) of the floating gate transistor.
    [0011] The memory cells C 1, j, C 2, j, C 3, j, C 4, j belong to a rank column j and the memory cells C1, j + 1, C2, j + 1, C3, j + 1, C4 , j + 1 belong to an adjacent column 3036221 8 rank j + 1. The memory cells C1, j, Cl, j + 1 belong to a first row of memory cells, or physical page PG1, and their floating gate transistors T1, j, T1, j + 1 have control gates CG1 connected to a memory array. CGL1 common grid control line. The memory cells C2, j, C2, j + 1 belong to a second row of memory cells, or physical page PG2, and their floating gate transistors T2, j, T2, j + 1 have control gates CG2 connected to a CGL2 common grid control line. The memory cells C3, j, C3, j + 1 belong to a third row of memory cells, or physical page PG3, and their floating gate transistors T3, j, T3, j + 1 have control gates CG3 connected to a CGL3 common grid control line. The memory cells C4, j, C4, j + 1 belong to a fourth row of memory cells, or physical page PG4, and their floating gate transistors T4, j, T4, j + 1 have control gates CG4 connected to a CGL4 common grid control line. In the rank column j, the memory cells C1, j, C2, j are twin memory cells and their selection transistors ST comprise a common selection gate CSG1,2 connected to a common word line WL1,2. Similarly, the memory cells C3, j, C4, j are twin memory cells and their selection transistors ST comprise a common selection gate CSG3,4 connected to a common word line WL3,4. In the column of rank j + 1, the memory cells C1, j + 1, C2, j + 1 are twin memory cells and their selection transistors ST comprise a common selection gate CSG1,2 connected to the word line. WL1,2. The memory cells C3, j + 1, C4, j + 1 are twin memory cells and their selection transistors ST comprise a common selection gate CSG3,4 connected to the common word line WL3,4. CSG1,2 or CSG3,4 common selection gates of pairs of twin memory cells are buried vertical grids formed as conductive trenches in the substrate, and source terminals (S) of ST selection transistors are connected to one another. to a buried source plane SL, extending beneath the region of the substrate where the memory cells are implanted.
    [0012] According to a first aspect of the invention, the memory plane MA1 comprises two bit lines per column of memory cells. Thus, two bit lines BI, j, B2, j are allocated to the memory cells of the rank column j, and two bit lines B1, j + 1, B2, j + 1 are allocated to the memory cells of the column of rank j + 1. Still according to this aspect of the invention, two twin memory cells are connected to different bit lines among the two bit lines allocated to the column in which they are located, whereas two adjacent but non-binned memory cells are connected to the same bit line. Thus, in the row column j: 5 - the drain terminal (D) of the floating gate transistor T1, j is connected to the bit line B1, j via a conductive path 1A, - the terminal of drain of the floating gate transistor T2, j is connected to the bit line B2, j via a conductive path 23B, - the drain terminal of the floating gate transistor T3, j is connected to the line of bit B2, through the conductive path 23B (the memory cell C2, j being adjacent but not binocular to the memory cell C3, j), and - the drain terminal of the floating gate transistor T4, j is connected at the bit line B 1, j via a conductive path 4A.
    [0013] In the row column j + 1: the drain terminal of the floating gate transistor Ti, j + 1 is connected to the bit line B 1, j + 1 via a conductive path 1C, the drain terminal of the floating gate transistor T2, j + 1 is connected to the bit line B2, j + 1 via a conductive path 23D, the drain terminal of the floating gate transistor T3, j + 1 is connected to the bit line B2, j + 1 via the conductive path 23D (the memory cell C2, j + 1 being adjacent but not twinned to the memory cell C3, j + 1), and - the drain terminal of the floating gate transistor T4, j + 1 is connected to the bit line B1, j + 1 via a conductive path 4C.
    [0014] Each memory cell can thus be read independently of its twin memory cell by means of the bit line to which it is connected and to which its twin memory cell is not connected. For example, after selecting the twin memory cells C1, j, C2, j by means of a selection voltage applied to the word line WL1,2, and after applying a gate control line reading voltage CGL1 , the memory cell C1, j can be read via the bit line B1, without it being necessary to apply a negative reading inhibition voltage to the gate control line CGL2 of the cell twin memory C2, j since this memory cell is not connected to the bit line B1, but to the bit line B2, j.
    [0015] The provision of such twin memory cells having a buried common selection gate has the advantage of considerably reducing the semiconductor area occupied by them, so that the minimum distance between two columns of memory cells is more determined by the constraints of their manufacturing process but by the constraints of the process of manufacturing the bit lines. Thus, it is the bit lines and the tolerances of their manufacturing process which impose the distance between two columns of memory cells and thus determine, in a general manner, the bulk of the memory plane.
    [0016] More particularly, the bit lines are made in the form of conductive tracks arranged side by side on an electrically insulating layer deposited on the memory cells, and are connected thereto by vertical electrical contacts called "vias" passing through the insulating layer. The distance between two conductive tracks and the minimum width of a conductive track are parameters imposed by the tolerances of the manufacturing process (to avoid short circuits between adjacent bit lines) and determine the minimum width of the memory cell columns. . By way of example, with the so-called "90 nanometer" microelectronic die (channel width of a transistor), a bit line made in the form of an aluminum conductive track may typically have a width of the order of 120 nm and the minimum distance between two bit lines 20 is of the order of 120 nm, so that the minimum width of a column of memory cells is typically of the order of 240 nm. With a conventional manufacturing method, the prediction of two bit lines per column of memory cells therefore involves doubling the width of each column of memory cells, which is not acceptable despite the advantage offered by the two lines. bit in terms of simplifying the process of reading memory cells. Thus, a second aspect of the invention relates to a method of manufacturing the memory plane MA1 making it possible to carry out two lines of bit per column without increasing the width of the columns of memory cells. One embodiment of this method will be described in the following, taking as an example the realization of the eight memory cells C 1, j to C 4, j + 1 of FIG. 2 and the four corresponding bit lines B 1, j to B2. , j + 1. More particularly, manufacturing steps of these memory cells will be described in relation with FIGS. 3 to 7 and steps of manufacturing the bit lines B 1, j to, B2, j + 1 will be described in relation to FIGS. Figures 8A to 17B. FIG. 3 shows a preliminary step of forming, in a semiconductor substrate PW, three STIO, ST1, ST2 longitudinal insulation trenches of STI type ("Shallow Trench Insolation") which delimit two substrate strips S1, S2 in which the memory cells will be made. This step is preceded by a step of implantation in the substrate of a doped buried layer forming a source plane SL (not visible in the figure) or implantation of several interconnected SL source lines. A source plane is generally preferred to source lines if it is intended to erase the memory cells by hot electron injection. During a step illustrated in FIG. 4, two conductive trenches are formed transversely to the substrate strips Si, S2, by etching the substrate, depositing a dielectric layer (not visible) and then depositing a polysilicon layer. PO (polycrystalline silicon) and etching thereof until only the conductive trenches P0 remain. Each conductive trench is intended to form both the word line WL1,2, WL2,3 and the selection gates CSG of the selection transistors ST of the memory cells.
    [0017] In a step illustrated in FIG. 5, a tunnel dielectric layer D1 is deposited on the substrate PW, then two polysilicon strips P1, intended to form floating gates FG, are formed on the layer D1 above. substrate strips S1, S2 by etching a polysilicon layer.
    [0018] During a step whose result is illustrated in FIG. 6, a dielectric layer D2 is deposited on the substrate and on the polysilicon strips P1, and then a layer of polysilicon is deposited on the layer D2. The polysilicon layer is then etched with the layer D2 and the strips P1 to obtain transverse polysilicon strips P2 covering residual band portions P1. The strips P2 are intended to form the gate control lines CG1, CG2, CG3. , CG4 floating gate transistors and band portions P1 are intended to form floating gates FG. During a step illustrated in FIG. 7, the substrate strips Si, S2 are doped by self-aligned dopant implantation on the gate control lines CGL1 to CGL4.
    [0019] This step reveals the drain regions (D) of the selection transistors ST and the drain (D) and source (S) regions of the floating gate transistors T1, J to T4, j + 1, and more. particularly: a drain region D (T1, j) of the transistor T1, j, a common drain region D (T2, j, T3, j) of the transistors T2, j, T3, j, 5 - a region of drain D (T4, j) of transistor T4, j, - a drain region D (T1, j + 1) of transistor T1, j + 1, - a common drain region D (T2, j + 1, T3, j + 1) transistors T2, j + 1, T3, j + 1, and - a drain region D (T4, j + 1) of transistor T4, j.
    [0020] The regions of the gate control lines CGL1 to CGL4 extending between these drain and source regions form the control gates CG1 to CG4 of the floating gate transistors, and the band portions P1 extending below the gate gates. Control CG1 to CG4 form the floating gates FG of the transistors. The conducting trenches PO form the word lines WL1,2, WL2,3 and the selection gates CSG of the selection transistors ST 15 of the memory cells. It will be noted that the portion of the memory array in progress, as shown in FIG. 7, forms here a "base brick" of the memory plane, namely the smallest unit making it possible to implement the method for manufacturing the memory. bit lines that will be described.
    [0021] This base brick is in practice made in conjunction with other base bricks which extend on the right and left sides, above and below (in the plane of Figure 7) of the base brick. Thus, the drain regions D (T2, j, T3, j) and D (T2, j + 1, T3, j + 1) are not the only regions of drains common to two floating gate transistors. Each drain region D (T1, j), D (T1, j + 1) is also a drain region common to another floating gate transistor belonging to an adjacent base brick located above the base brick. shown, and each drain region D (T4, j), D (T4, j + 1) is a drain region common to another floating gate transistor belonging to an adjacent base brick located below the brick of represented base.
    [0022] Steps for making the bit lines B 1, j, B 1, j + 1, B2, j, B2, j + 1 above the basic brick will now be described in connection with Table 1 in the Appendix. , which forms an integral part of the description, and with reference to FIGS. 8A to 17B. These steps include dielectric layer deposition steps, vias formation in the dielectric layers, and formation of conductive track sections on the dielectric layers and over the vias, and so on until the lines are formed. debit. The conductive tracks may be formed by etching a metal layer or by chemical and mechanical polishing of a metal layer or CMP (Chemical Mechanical Polishing) technique. The CMP technique requires that trenches corresponding to the conductive tracks, which are then filled with a conductive material, for example aluminum, be deposited by depositing a conductive layer on the dielectric layer in the carrier dielectric layer. The conductive layer is then polished to keep only the conductive tracks in the trenches. The following references, selected in relation to those shown in FIG. 2, will be used: 10 - A = bit line B 1, j, - B = bit line B2, j, - C = bit line B 1, j + 1, - D = bit line B2, j + 1, 15 - 1A = conductive path connecting the drain region of transistor T1, j to bit line A, - 23B = conductive path between the drain regions of transistors T2 , j, T3, j to the bit line B, - 4A = conductive path connecting the drain region of the transistor T4, j to the bit line A. 20 - 1C = conductive path connecting the drain region of the transistor T1, j + 1 at the bit line C, - 23D = conductive path between the drain regions of the transistors T2, j + 1, T3, j + 1 at the bit line D, - 4C = conductive path connecting the drain region from transistor T4, j + 1 to bit line C. - V1Ax = level via "x" forming part of conductive path 1A, - V23Bx = level via "x" forming part of conductive path 23B, - V4Ax = via level "x" being part of the chemi n conductor 4A. - V1Cx = level via "x" forming part of the conductive path 1C, - V23Dx = level via "x" forming part of the conductive path 23D, 30 - V4Cx = level via "x" forming part of the conductive path 4C. - T1Ax = section of level track "x" forming part of conducting path 1A, - T23Bx = section of level track "x" forming part of conducting path 23B, - T4Ax = section of level track "x" forming part of conducting path 4A, 35 - T1Cx = section of level track "x" forming part of conducting path 1C, - T23Dx = section of level track "x" forming part of conducting path 23D, 3036221 14 - T4Cx = section of track of level "x" forming part of the conductive path 4C. During a step E1 illustrated in FIG. 8A, a dielectric layer 10 is deposited on the substrate, and the level 0 vias mentioned in Table 1 are made in the layer 10. The locations of the vias relative to the drain regions of the floating gate transistors are described in Table 1, two elements appearing in the same column of Table 1 and in two consecutive lines being superimposed and in electrical contact. The via VIA ° is thus realized above the drain region D (T1, j), the via V23B0 realized above the drain region D (T2, j, T3, j), the via V4A0 realized at the above the drain region D (T4, j), via VICO made over the drain region D (T1, j + 1), via V23D0 made over the drain region D ( T2, j + 1, T3, j + 1) and the via V4C0 made above the drain region D (T4, j + 1). It should be noted that the VIAO, VICO and V4A0 VACO end vias of the base brick are also base brick end vias above and below the basic brick shown, and are therefore shared with the upper and lower adjacent base bricks. As seen in FIG. 8A, the vias are arranged along two axes of bit lines X 1 and X 1 + 1 which respectively extend above the Si doped substrate band and above the band of doped substrate S2. Here, the vias VIAO, V23B0, V4A0 are aligned on the bit line axis Xj and vias VICO, V23D0, V4C0 are aligned on the bit line axis Xj + 1. Table 1 comprises columns "Xj" and "Xj + 1" which show the alignment of each element relative to these axes, an element mentioned in a column "Xj" being aligned on the axis Xj and an element mentioned in a column Xj + 1 being aligned on the axis Xj + 1.
    [0023] Fig. 8B is a schematic perspective view in section of the substrate showing the memory cells at this stage of their manufacture. The substrate PW, which extends above the buried doped layer SL forming the source plane, the isolation trenches STIO, ST1, ST2 made in the substrate PW, and the longitudinal strips of doped substrate S 1 are distinguished. , S2 forming the drain and source regions of the floating gate transistors and the drain regions of the selection transistors, the transverse buried conducting trenches forming the word lines WL1,2, WL2,3 and the gates of the gate selection transistors. memory cells, the CGL1, CGL2, CGL3, CGL4 transverse polysilicon bands forming the grid control lines and the control gates of the floating gate transistors, and the aligned VIA °, V23B0, V4A0, VICO, V23D0, V4C0 vias 3036221 15 on the axes Xj, Xj + 1. The dielectric layer IO is not shown for the sake of visibility of the other elements represented. During a step E2 illustrated in FIG. 9, a metal layer M1 ("metal 1") is deposited on the dielectric layer I0 and is then etched or chemically and mechanically polished to obtain the M1 level conductive track sections. Table 1. Each conductor section extends above the level 0 via which is mentioned in Table 1. The conductive track portion T23B1 has a longitudinal portion aligned with the axis Xj and a transverse portion. which joins the axis Xj + 1, and 10 thus performs a "routing jump" from the axis Xj to the axis Xj + 1. The section T23B1 therefore appears both in the "Xj" column and in the "Xj + 1" column of Table 1. During a step E3 illustrated in FIG. 10A, a dielectric layer I1 is deposited on the substrate and the level 1 vias mentioned in Table 1 are made in the layer II. Each via extends above the level M1 conductive track section which is mentioned in Table 1. The position of the via relative to the axes Xj, Xj + 1, namely aligned on the axis Xj or on the axis Xj + 1 is as previously given in Table 1 with reference to the "Xj" or "Xj + 1" column in which the via is mentioned.
    [0024] FIG. 10B is a diagrammatic perspective view in section of the substrate showing the vias made in step E3 and the sections of tracks made in step E2 and the vias made in step E1. The dielectric layers I0 They are not represented for the sake of visibility of the other elements represented.
    [0025] During a step E4 illustrated in FIG. 11, a metal layer is deposited on the dielectric layer I1 and then etched or is chemically and mechanically polished to obtain the M2 level ("metal 2") conductive track segments. As mentioned in Table 1, each conductive track section extends above the level 1 via which is mentioned in Table 1. The conductive track section above the vias V1A1 and V4A1 forms the bit line. Bl, j. The bit line thus extends beyond the basic brick shown over the entire length of the memory cell column. During a step E5 illustrated in FIG. 12A, a dielectric layer 12 is deposited on the substrate, and the level 2 vias mentioned in Table 1 are made in the layer 12. Each via extends above of the level M2 conductive track section 3036221 16 is mentioned in Table 1. The position of the via relative to the axes Xj, Xj + 1 is as previously given by Table 1. Figure 12B is a schematic view in perspective and in section of the substrate showing the sections of tracks and vias made during steps E4, E5 and those previously made. The dielectric layers I0, I1, 12 are not shown for the sake of visibility of the other elements shown. During a step E6 illustrated in FIG. 13, a metal layer is deposited on the dielectric layer 12 and is etched or is chemically and mechanically polished to obtain the M3 ("metal 3") conductive track sections mentioned above. in Table 1. Each section of conductive track extends above the level 2 via which is mentioned in Table 1. The conductive track section above via V23B2 has a first transverse section T23B3 which passes from the axis Xj + 1 to the axis Xj and a longitudinal section aligned on the axis Xj and forming the bit line B2, j. The bit line thus extends beyond the basic brick shown over the entire length of the memory cell column. During a step E7 illustrated in FIG. 14A, a dielectric layer 13 is deposited on the substrate, and the level 3 vias mentioned in Table 1 are made in the layer 13. Each via extends above of the level M3 conductive track section which is mentioned in Table 1. The position of the via relative to the axes Xj, Xj + 1 is as previously given in Table 1.
    [0026] FIG. 14B is a diagrammatic perspective view in section of the substrate showing the sections of tracks and vias made during steps E6, E7 as well as those previously made. The dielectric layers I0, II, 12, 13 are not shown for the sake of visibility of the other elements shown.
    [0027] During a step E8 illustrated in FIG. 15, a metal layer is deposited on the dielectric layer 13 and is then etched or is chemically and mechanically polished to obtain the M4 ("metal 4") conductive track sections mentioned above. in Table 1. Each section of conductive track extends above the level 3 via which is mentioned in Table 1. The three sections of conductive track made here are arranged transversely to the axes Xj, Xj + 1 and are therefore in the two columns "Xj" and "Xj + 1" of Table 1.
    [0028] The step E8 may optionally comprise the production of conductive tracks WLS1,2, WLS3,4 which cross the memory plane transverse to the axes Xj, Xj + 1 and are connected from time to time to the word lines WLS1,2, WLS3 , 4 to decrease their linear resistance, these connections being outside the field of FIG. 15. Other functional conductive tracks of this type, which do not intervene in the connection of the memory cells to the bit lines, for example tracks connected to the gate control lines CGL1 to CGL4 can be performed simultaneously to the track sections for connecting the memory cells to the bit lines.
    [0029] During a step E9 illustrated in FIG. 16A, a dielectric layer 14 is deposited on the substrate, and the level 4 vias mentioned in Table 1 are made in the layer 14. Each via extends above of the level M4 conductive track section which is mentioned in Table 1. The position of the via relative to the axes Xj, Xj + 1 is as previously given by Table 1. Figure 16B is a schematic perspective and sectional view the substrate showing the sections of tracks and vias made during the steps E8, E9 and those previously made. The dielectric layers 10, 11, 12, 13, 14 are not shown for the sake of visibility of the other elements shown. During a step E10 illustrated in FIG. 17A, a metal layer is deposited on the dielectric layer 14 and is then etched or is chemically and mechanically polished to obtain the bit lines B1, j + 1, B2, and j + 1 mentioned. in Table 1. The bit line B1, j + 1 is in contact with the vias V1C4 and V4C4 and the bit line B2, j + 1 is in contact with via V23D4. Figure 17B is a schematic perspective view in section of the substrate showing all the vias and sections of tracks made. As before, the different dielectric layers are not represented for the sake of visibility of the other elements represented. Table 1 shows how the drain regions of the floating gate transistors are connected to the bit lines through the set of vias and runway sections 35 made. Table 1 as well as the previously described figures also show that the bit lines B1, j, B2, j and B1, j + 1 are superimposed, these being carried out respectively on the levels M2, M3 and M5 and aligned on the axis Xj. Only the bit line B2, j + 1 made on the level M5 is aligned on the axis Xj + 1. This method of manufacture thus makes it possible to benefit from the advantages in terms of size afforded by twin memory cells having a common buried vertical selection gate (control gate of their selection transistors), while allowing the cells to be read individually. memory thanks to the prediction of two lines of bit per column, and this without penalizing the congestion of the memory plane. The method is capable of various variants with respect to the routing of the bit line sections and the arrangement of the vias, as well as the materials used to make these elements. FIG. 18 is the circuit diagram of an integrated circuit device DV comprising the memory plane MA1 of FIG. 2. The device DV comprises a control circuit CCT1, a word line decoder RD1, a column decoder CD1, reading amplifiers SA in number equal to the number of bits of a word to be read in the memory plane, for example an eight-bit word BO-B7, and programming locks BLT1 for applying voltages to the bit lines B 1 , j, B2, j, B 1, j + 1, B2, j + 1, as a function of a DTW word to be written in the memory, for example an eight-bit word BO-B7.
    [0030] The RD1 word line decoder controls the voltages applied to the gate control lines CGL1 to GL4 and to the word line WL1,2, WL2,3 as a function of a most significant address A (n-1). A (x) of a word, or line address. The decoder CD1, in combination with the latches BLT1, controls the voltages applied to the bit lines B 1, j, B2, j, B 1, j + 1, B2, j + 1 as a function of a low-order address. A (x-1) -A (0) of the word, or column address, the row and column addresses together forming the address A (n-1) -A0 of a word to read or write in the memory map. In read mode, the decoder CD1 connects the sense amplifiers SA to the bit lines connected to the memory cells to be read, and the sense amplifiers provide the word DTR.
    [0031] The circuit CCT1 comprises for example a CPU, a VGEN voltage generator, and address and data registers. It executes read or write commands, provides control of the decoders, supply of the voltages necessary for reading or writing operations (erase-programming), supply of the high and low order addresses 35 to the decoders , and if necessary runs a program for refreshing memory cells.
    [0032] Due to the presence of two bit lines per column, the word line decoder RD1 is configured to be able to separately control the voltages applied to the memory gate lines of twin memory cells, either CGL1, CGL2 or CGL3, CGL3 , which here have the same high-order address A (n-1) -A (x). This separate voltage control can be reserved for erase operations, to apply a positive voltage to these memory cells located on a page that is twin to that containing the memory cell (s) being erased. In read mode, however, the decoder can apply the same voltage to the twin gate control lines or all the grid control lines of the memory plane to limit logic gate switching and thus limit the power consumption of the memory, because the selection of read memory cells is ensured by means of word lines WL. In such an embodiment, the decoder RD1 receives, in addition to the most significant address A (n-1) -A (x) of a word, the least significant bit A (0) of the low-order address A (x-1) -A (0) of the word. The decoder RD2 also receives from the circuit CCT1 an information signal which indicates to it whether the address decoding to be performed takes place in the context of reading, deleting or programming of memory cells. If the decoding occurs as part of an erasure, the decoder RD1 differentiates the two gate control lines according to the A (0) bit. For example, the decoder RD1 selects the gate control line CGL1 if the bit line B 1, j is designated by the full address received by the memory, or selects the gate control line CGL2 if the bit line B2, j is denoted by the complete address received by the memory. In an equivalent variant, the decoder may receive a signal from the column decoder CD1 indicating which of the two grid control lines must be selected. Those skilled in the art will naturally be able to provide other embodiments of the decoder, for example to control distinctly the voltages applied to the control lines of the grid of memory cells in reading, programming and erasure.
    [0033] 20 APPENDIX Table 1 forming an integral part of the description Driver path lA 23B 4A 1C 23D 4C Bit line axis = 'Xj axis Xj axis + 1 1 Xj axis + 1 Xj axis Xj axis + 1 Xj axis Xj axis + 1 Xj axis Axis Xj + 1 Axis Xj Axis Xj + 1 Axis Xj Region, - m E- ^, - + 'D (T2, j + 1, T3, j + 1) + of drain' -4 ..- cv E- -4.-A A '^ P = A 41 ". Fig. 8A, 8B El 0 V1AO V23B0 V4A0 V1CO V23D0 V4C0 9 E2 M1 T1A1 T23B1 T23B1 T4A1 T1C1 T23D1 T4C1 10A, 10B E3 1 V1A1 V23B1 V4A1 V1C1 V23D1 V4C1 11 E4 M2 B1 , T23B2 B1, T1B2 T23D2 T4C2 12A, 12B E5 2 V23B2 V1C2 V23D2 V4C2 13 E6 M3 B2, T23133 T1C3 T23D3 T4C3 14A, 14B E7 3 V1C3 V23D3 V4C3 E8 M4 T1C4 T1C4 T23D4 T23D4 T4C4 T4C4 16A, 16B E9 4 V1C4 V23D4 V4C4 17A, 17B El0 M5 B1, j + 1 B2, j + 1 Blet
    权利要求:
    Claims (15)
    [0001]
    REVENDICATIONS1. Non-volatile memory (DV, MEM1) on a semiconductor substrate (PW), comprising rows and columns of memory cells (C1, j, C1, j + 1), the memory cell columns comprising pairs of twin memory cells (C1, j, C2, j; C 1, j + 1, C2, j + 1) each comprising a floating gate transistor (T1, j, T2, j, T1, j + 1, T2, j + 1) and a selection transistor (ST) comprising a selection gate (CSG1,2) common to the selection transistor of the twin memory cell, - bit lines (B1, j) each connected to conduction terminals of gate transistors floating point of the same column of memory cells, - gate control lines (CGL1) transverse to the bit lines, connected to control gates (CG1) of floating gate transistors of the same row, characterized in that it comprises two bit lines (B1, j, B2, j) per column of memory cells and in that two adjacent adjacent memory cells (C1, j, C2, j) of the same column are not connected to the same bit line while two adjacent non-twin memory cells (C2, j, C3, j) of the same column are connected to the same bit line.
    [0002]
    2. The memory of claim 1, comprising, for two adjacent columns of memory cells, three bit lines (B1, j, B2, j, B1, j + 1) arranged and superimposed over a first column of cells. memory on three different interconnection levels and a fourth bit line (B2, j + 1) arranged above a second column of memory cells.
    [0003]
    Memory according to one of claims 1 and 2, comprising: - a first bit line (B1, j) aligned on a first bit line axis (Xj) extending over a first column of memory cells, and connected to floating gate transistors of the first column by a first conductive path (1A) comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers, - a second bit line (B2 , j) aligned with the first bit line axis (Xj), and connected to floating gate transistors of the first column by a second conductive path (23B) comprising vias traversing insulating layers and arranged conductive line sections on the insulating layers, a third bit line (B2, j) aligned with the first bit line axis (Xj), and connected to floating gate transistors of a second memory cell column by a third vs conductive path (1C) comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers, and 5 - a fourth bit line (B2, j + 1) aligned on a second bit line axis (Xj +1) extending above the second column of memory cells, and connected to floating gate transistors by a fourth conductive path (23D) comprising vias traversing insulating layers and conductive line sections arranged on the layers insulating. 10
    [0004]
    4. The memory as claimed in claim 3, comprising first (IO), second (I1), third (I2), fourth (I3) and fifth (I4) insulating layers, and wherein: the first bit line (B1, j) extends over the second insulating layer (I1), - the second bit line (B2, j) extends over the third insulating layer (I2), - the third bit line (B1, j + 1 ) extends over the fifth insulating layer (I4), and - the fourth bit line (B2, j + 1) extends over the fifth insulating layer (I4).
    [0005]
    The memory of claim 4, wherein the first conductive path (1A) comprises a via (V1A0) aligned with the first bit line axis (Xj), traversing the first insulating layer (IO), a line segment conductive (T1A1) aligned on the first bit line axis, arranged on the first insulating layer (IO), and a via (V1A1) aligned on the first bit line axis (Xj), passing through the second insulating layer (I1) ).
    [0006]
    6. Memory according to one of claims 4 and 5, wherein the second conductive path (23B) comprises a via (V23B0) aligned on the first bit line axis (Xj), passing through the first insulating layer (IO). , a conductive line section (T23B1) extending from the first bit line axis to the second bit line axis (Xj + 1), arranged on the first insulating layer (IO), a via (V23B1) aligned with on the second bit line axis (Xj + 1), passing through the second insulating layer (I1), a conductive line section (T23B2) aligned with the second bit line axis, arranged on the second insulating layer (I1 ), a via (V23B2) aligned on the second bit line axis (Xj + 1), traversing a third insulating layer (I2), and a conductive line section (T23B3) extending from the second bit line axis to the first bit line axis (Xj + 1), arranged on the third insulating layer (I2). 35 3036221 23
    [0007]
    7. Memory according to one of claims 4 to 6, wherein the third conductive path (1C) comprises a via (V1CO) aligned on the second bit line axis, passing through the first insulating layer (IO), a section of conductive line (T1C1) aligned on the first bit line axis, arranged on the first insulating layer (IO), a via 5 (V1C1) aligned on the first bit line axis, passing through the second insulating layer (I1), a conductive line section (T1C2) aligned with the second bit line axis, arranged on the second insulating layer (I1), a via (V1C2) aligned with the second bit line axis, passing through the third insulating layer (I2 ), a conductive line section (T1C3) aligned with the second bit line axis, arranged on the third insulating layer (I2), a via (V1C3) aligned with the second bit line axis, passing through the fourth layer insulation (I3), a conductive line section (T1C4) extending from the second bit line axis to the first bit line axis (Xj), arranged on the fourth insulating layer (I3), and a via (V1C4) aligned on the first bit line axis, traversing a fifth insulating layer (I4). 15
    [0008]
    8. Memory according to one of claims 4 to 7, wherein the fourth conductive path (23D) comprises a via (V23D0) aligned on the second bit line axis, passing through the first insulating layer (IO), a section of conductive line (T23D1) aligned on the first bit line axis, arranged on the first insulating layer (IO), a via (V23D1) aligned with the first bit line axis, passing through the second insulating layer (I1), a conductive line section (T23D2) aligned with the second bit line axis, arranged on the second insulating layer (I1), a via (V23D2) aligned with the second bit line axis, passing through the third insulating layer (I2 ), a conducting line section (T23D3) aligned with the second bit line axis, arranged on the third insulating layer (I2), a via (V23D3) aligned with the second bit line axis, traversing the fourth layer insulation (I3), a conductor line section (T23D4) arranged on the fourth insulating layer (I3), and a via (V23D4) aligned on the second bit line axis, passing through a fifth insulating layer (I4). 30
    [0009]
    9. Memory according to one of claims 1 to 8, comprising read circuits (SA) and a column decoder (CD1) configured to read the memory cells of the same column through one of the two bit lines. attributed to the column.
    [0010]
    10. A method for manufacturing a non-volatile memory (DV, MEM1) on a semiconductor substrate (PW), the memory comprising pairs of twin memory cells (C1, j, C2, j) each comprising a gate transistor. floating point (T1, j, T2, j) and a selection transistor (ST) comprising a selection gate (CSG1,2) common to the selection transistor of the twin memory cell, the method comprising the steps of: - realizing first and second columns of memory cells each comprising pairs (C1, j, C2, j; C1, j + 1, C2, j + 1) of twin memory cells, - producing a first bit line (B1, j) aligned with a first bit line axis (Xj) extending over the first column of memory cells, and connected to floating gate transistors of non-twin memory cells of the first column by a first conductive path (1A) comprising vias traversing insulating layers and sections s of conductive lines arranged on the insulating layers, 10 - producing a second bit line (B2, j) aligned with the first bit line axis (Xj), and connected to floating gate transistors of other non-memory cells binoculars of the first column by a second conductive path (23B) comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers, 15 - producing a third bit line (B2, j) aligned with the first axis bit line (Xj), and connected to floating gate transistors of non-twin memory cells of the second column by a third conductive path (1C) comprising vias traversing insulating layers and conductive line sections arranged on the layers isolating, and 20 - providing a fourth bit line (B2, j + 1) aligned with a second bit line axis (Xj + 1) extending over the second column of memory cells, and connected to floating gate transistors of other non-twin memory cells of the second column by a fourth conductive path (23D) comprising vias traversing insulating layers and conductive line sections arranged on the insulating layers. 25
    [0011]
    11. The method of claim 10, including the steps of: - realize first (IO), second (I1), third (I2), fourth (I3) and fifth (I4) insulating layers, - realize the first line of bit (B1, j) on the second insulating layer (I1), - making the second bit line (B2, j) on the third insulating layer (I2), - realizing the third bit line (B1, j + 1 ) on the fifth insulating layer (I4), and - performing the fourth bit line (B2, j + 1) on the fifth insulating layer (I4).
    [0012]
    12. Method according to one of claims 10 and 11, comprising steps of realization of the first conductive path (1A) comprising the realization of a via (V1A0) aligned on the first bit line axis (Xj), crossing a first insulating layer (IO), a conductive line section (T1A1) aligned with the first bit line axis, arranged on the first insulating layer (IO), and a via (V1A1) aligned with the first bit line axis (Xj) traversing a second insulating layer (I1). 5
    [0013]
    13. Method according to one of claims 10 to 12, comprising steps of producing the second conductive path (23B) comprising the realization of a via (V23B0) aligned on the first bit line axis (Xj), passing through a first insulating layer (IO), of a conductive line section (T23B1) extending from the first bit line axis to the second bit line axis (Xj + 1), arranged on the first insulating layer 10 ( IO), a via (V23B1) aligned on the second bit line axis (Xj + 1), passing through a second insulating layer (I1), a conductive line section (T23B2) aligned with the second axis of bit line, arranged on the second insulating layer (I1), a via (V23B2) aligned on the second bit line axis (Xj + 1), passing through a third insulating layer (I2), and a section conductive line (T23B3) extending from the second bit line axis to the first bit line axis (Xj + 1), arranged on the third iso layer lante (I2).
    [0014]
    14. Method according to one of claims 10 to 13, comprising steps of making the third conductive path (1C) comprising the embodiment of a via (V1CO) 20 aligned with the second axis of bit line, passing through a first layer. insulation (IO), a conductive line section (T1C1) aligned on the first bit line axis, arranged on the first insulating layer (IO), a via (V1C1) aligned with the first line axis of bit, passing through a second insulating layer (I1), a conductive line section (T1C2) aligned with the second bit line axis, arranged on the second insulating layer (I1), with a via (V1C2) aligned with on the second bit line axis, passing through a third insulating layer (I2), a conductive line section (T1C3) aligned on the second bit line axis, arranged on the third insulating layer (I2), a via (V1C3) aligned with the second bit line axis, traversing a fourth insulating layer (I 3), a conductive line section (T1C4) extending from the second bit line axis to the first bit line axis (Xj), arranged on the fourth insulating layer (I3), and a via (V1C4) aligned on the first bit line axis, traversing a fifth insulating layer (I4).
    [0015]
    15. Method according to one of claims 10 to 14, comprising steps of producing the fourth conductive path (23D) comprising the embodiment of a via 35 (V23D0) aligned on the second bit line axis, passing through a first layer. insulation (IO), a conductive line section (T23D1) aligned on the first bit line axis 26, arranged on the first insulating layer (IO), a via (V23D1) aligned with the first axis of bit line, passing through a second insulating layer (I1), a conductive line section (T23D2) aligned with the second bit line axis, arranged on the second insulating layer (I1), a via (V23D2) aligned on the second bit line axis, through a third insulating layer (I2), a conductive line section (T23D3) aligned with the second bit line axis, arranged on the third insulating layer (I2), a via (V23D3) aligned with the second bit line axis, traversing a fourth insulating layer (I3), a conductive line section (T23D4) arranged on the fourth insulating layer (I3), and a via (V23D4) aligned on the second bit line axis, passing through a fifth insulating layer (I4).
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    同族专利:
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    法律状态:
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    FR1554163A|FR3036221B1|2015-05-11|2015-05-11|INTERCONNECTION STRUCTURE OF BINARY MEMORY CELLS|FR1554163A| FR3036221B1|2015-05-11|2015-05-11|INTERCONNECTION STRUCTURE OF BINARY MEMORY CELLS|
    CN201910908144.XA| CN110689912A|2015-05-11|2015-11-26|Twin memory cell interconnect structure|
    CN201510846047.4A| CN106158036B|2015-05-11|2015-11-26|Twin memory cell interconnection structure|
    CN201520965493.2U| CN205282476U|2015-05-11|2015-11-26|Nonvolatile memory on semiconductor substrate|
    US14/980,853| US9627068B2|2015-05-11|2015-12-28|Twin memory cell interconnection structure|
    US15/453,663| US9941012B2|2015-05-11|2017-03-08|Twin memory cell interconnection structure|
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